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篇名 |
Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system |
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期刊 |
Optics Research Group, Faculty of Applied Sciences 2005-12 |
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DOI |
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作者 |
Joseph J.M. Braat,Peter Dirksen, Augustus J.E.M. Janssen |
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日期 |
December, 2005 |
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摘要 |
The judgment of the imaging quality of an optical system can be carried out by examining its through-focus intensity distribution. It has been shown in a previous paper that a scalar-wave analysis of the imaging process according to the extended Nijboer-Zernike theory allows the retrieval of the complex pupil function of the imaging system, including aberrations and transmission variations. However, the applicability of the scalar analysis is limited to systems with an NA-value of the order of 0,60 or less; beyond these values polarization effects become significant. In this scalar retrieval method, the complex pupil function is represented by means of the coefficients of its expansion in a series involving the Zernike polynomials. This representation is highly efficient, in terms of number and magnitude of the required coefficients, and lends itself quite well for matching procedures in the focal region. This distinguishes the method from the retrieval schemes in the literature, that are normally not based on Zernike-type expansions, and rather rely on point-by-point matching procedures. |
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推荐理由 |
本文提出了在高NA时，矢量偏振波前的拟合方式，不仅考虑了传统的波前像差项的拟合，同时还考虑到系统对波前的切趾作用。对于大孔径单色光成像系统的设计和分析提供了理论指导作用。 |
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供稿 |
庞武斌 |
